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臺(tái)式三維原子層沉積系統(tǒng)ALD

原子層沉積（Atomic layer deposition， ALD）是通過(guò)將氣相前驅(qū)體脈沖交替的通入反應(yīng)器，化學(xué)吸附在沉積襯底上并反應(yīng)形成沉積膜的一種方法，是一種可以將物質(zhì)以單原子膜形式逐層的鍍?cè)谝r底表面的方法。因此，它是一種真正的納米技術(shù)，以精確控制方式實(shí)現(xiàn)納米級(jí)的超薄薄膜沉積。由于ALD利用的是飽和化學(xué)吸附的特性，因此可以確保對(duì)大面積、多空、管狀、粉末或其他復(fù)雜形狀基體的高保形的均勻沉積。

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應(yīng)用案例

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已發(fā)表文獻(xiàn)

1、LoïcAssaud et al. Systematic increase of electrocatalytic turnover over nanoporousPt surfaces Prepared by atomic layer deposition. J. Mater. Chem. A (2015) DOI: 10.1039/c5ta00205b

2、XiangyiLuo et al. Pd nanoparticles on ZnO-passivated porous carbon by atomic layer deposition: an effective electrochemical catalyst for Li-O2 battery. Nanotechnology(2015) 26， 164003. DOI:10.1088/0957-4484/26/16/164003

3、HengweiWang， et al. Precisely-controlled synthesis of Au@Pd core–shell bimetallic catalyst via atomic layer deposition for selective oxidation of benzyl alcohol. Journal of Catalysis (2015) 324， 59–68. DOI: 10.1016/j.jcat.2015.01.019

4、 Sean W. Smith， et al. Improved oxidation resistance of organic/inorganic composite atomic layer deposition coated cellulose nanocrystal aerogels. J. Vac. Sci. Technol. A (2014) 4， 32 DOI: 10.1116/1.4882239

5、Fatemeh Sadat MinayeHashemi et al. A New Resist for Area Selective Atomic and Molecular Layer Deposition on Metal−Dielectric Patterns. J. Phys. Chem. C (2014)， 118， 10957−10962. DOI: 10.1021/jp502669f

6、Jeffrey B. Chou， et.al Enabling Ideal Selective Solar Absorption with 2D Metallic Dielectric Photonic Crystals. Adv. Mater. (2014)， DOI: 10.1002/adma.201403302.

7、 Jin Xie， et al. Site-Selective Deposition of Twinned Platinum Nanoparticles on TiSi2 Nanonets by Atomic Layer Deposition and Their Oxygen Reduction Activities. ACS Nano (2013)， 7， 6337–6345. DOI: 10.1021/nn402385f

8、Pengcheng Dai， et al. Solar Hydrogen Generation by Silicon Nanowires Modified with Platinum Nanoparticle Catalysts by Atomic Layer Deposition. Angew. Chem. Int. Ed. (2013)， 52， 1 –6. DOI: 10.1002/anie.201303813

9、Joseph Larkin et al. Slow DNA Transport through Nanoporesin Hafnium Oxide Membranes. ACS Nano(2013)， 11， 10121–10128. DOI: 10.1021/nn404326f

10、Thomas M et al. Extended lifetime MCP-PMTs: Characterization and lifetime measurements of ALD coated microchannel plates， in a sealed photomultiplier tube Nuclear Instruments and Methods in Physics Research A (2013) 732， 388–391. DOI: 10.1016/j.nima.2013.07.023

11、Kevin J. Maloney et al. Microlattices as architected thin films: Analysis of mechanical properties and high strain elastic recovery. APL Mater. 1， 022106 (2013) DOI: 10.1063/1.4818168

12、 Sean W. Smith et al. Improved Temperature Stability of Atomic Layer Deposition Coated Cellulose Nanocrystal Aerogels. Mater. Res. Soc. Symp. Proc. (2012) DOI: 10.1557/opl.2012.